Ref: DIT-5200L

Low cost, high accuracy inductive differential position sensor - ± 0.25 to ± 2mm

Differential displacement measurement by eddy current
1, 2 or 3 measurement channels
Resolution < 150 nm
Target: Aluminium
Non-linearity < 0.1% PE
Very low temperature sensitivity < 0.03% PE/°C
Measuring range: ±0.3 mm to ±1.9 mm
Output signal: ± 10 VDC
Bandwidth: 0-20 kHz
Power supply: ± 15 Vdc
Operating temperature : -61.6°F to +221°F (sensor)

Introduction

The DIT 5200L is a non-contact differential displacement measurement system of very high accuracy. The measurement is based on the use of two identical eddy current sensors positioned on either side of the target and connected to remote electronics. The displacement of the target from the reference position generates an electrical signal reflecting the variation, without any noise and without the need to add the signals.

By precisely pairing the sensors, the DIT-5200L can measure positional variations with very high accuracy (approx. 0.15% of the measurement range), resolution (< 100 nm), and bandwidth (0-20 kHz) over ranges from +/- 250µm to +/- 1.9mm.

It can be used in cryogenic conditions or under a vacuum of 10-6 torr.

Setup

The system consists of an eddy current transducer (or probe), and remote electronics for powering the transducer and conditioning the response. The DIT-5200L can handle up to 3 measurement channels, and outputs a +/- 10V voltage that is perfectly linear with displacement.

Sensor specifications

Probe	measuring range ±mm	Position at 0 in mm	Standard non-linearity ± %PE	Maximum non-linearity ±%FR	Typical Sensor TempCo ± %FR/°C	Resolution % PE at 1 kHz BW at PE	Resolution % PE at 1 kHz at zero
15N	0.25	0.38	0.15%	0.30%	0.02%	0.015%	0.004%
15N	0.51	0.64	0.25%	0.50%	0.03%	0.008%	0.002%
15N	0.89	1.02	0.50%	1.00%	0.03%	0.005%	0.003%
20N	0.25	0.51	0.10%	0.20%	0.02%	0.025%	0.005%
20N	0.51	1.02	0.15%	0.30%	0.02%	0.015%	0.005%
20N	1.27	1.52	0.25%	0.50%	0.03%	0.008%	0.003%
20N	1.91	2.16	0.50%	1.00%	0.03%	0.005%	0.002%